JPH0188775U - - Google Patents
Info
- Publication number
- JPH0188775U JPH0188775U JP18380387U JP18380387U JPH0188775U JP H0188775 U JPH0188775 U JP H0188775U JP 18380387 U JP18380387 U JP 18380387U JP 18380387 U JP18380387 U JP 18380387U JP H0188775 U JPH0188775 U JP H0188775U
- Authority
- JP
- Japan
- Prior art keywords
- support stand
- thin film
- forming apparatus
- film forming
- discharge nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18380387U JPH0188775U (en]) | 1987-12-03 | 1987-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18380387U JPH0188775U (en]) | 1987-12-03 | 1987-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188775U true JPH0188775U (en]) | 1989-06-12 |
Family
ID=31475210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18380387U Pending JPH0188775U (en]) | 1987-12-03 | 1987-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188775U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016182540A (ja) * | 2015-03-25 | 2016-10-20 | 旭有機材株式会社 | 液体吐出装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63213929A (ja) * | 1987-03-02 | 1988-09-06 | Nec Corp | 半導体装置の製造装置 |
-
1987
- 1987-12-03 JP JP18380387U patent/JPH0188775U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63213929A (ja) * | 1987-03-02 | 1988-09-06 | Nec Corp | 半導体装置の製造装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016182540A (ja) * | 2015-03-25 | 2016-10-20 | 旭有機材株式会社 | 液体吐出装置 |